Generation battery electromagnetic chuck

What is an electrostatic chuck?

The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking” the wafer.

How to use a permanent electromagnetic chuck?

When a conventional permanent electromagnetic chuck is used, it is necessary to turn it off once and after lowering the magnetizing voltage, turn it on again in order to set a low magnetic force for straightening grinding operations.

When was magnetic chuck invented?

The company was founded in 1966 as named in Guang Dar Machining Shop and permanent type magnetic chuck was the major product at the time. The first generation of electrical magnetic chuck was developed in 1971 to meet a demand for large size grinding machine which got a very well reputation.

How does a Chuck work?

Thanks to fi ner pole pitches on the chuck work face, these chucks hold thin and wide workpieces fi rmly. Since electricity is supplied momentarily only to control the magnetomotive force when mounting/demounting a workpiece, little heat is generated internally to maintain accuracy.

What are the advantages of Electrostatic chucks?

Temperature control: Another notable advantage of electrostatic chucks is the capacity to control temperature during manufacturing. E-chucks use electricity to heat or cool the substrate as needed. This ability ensures optimal processing conditions and reduces thermal stress on sensitive materials.

What are E-Chuck power supplies?

E-chuck power supplies provide the voltage required to generate the electrostatic field. This generated energy allows the chuck to exert the desired force on the object. These power sources are critical in maximizing the e-chuck's performance and dependability in various manufacturing environments.